عنوان
پدید آورنده
موضوع
رده
TJ1191.5 B976 2004
TJ1191
.
5
B976
2004
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
1402080212
(Number (ISBN
9781402080210
NATIONAL BIBLIOGRAPHY NUMBER
Number
b554133
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
An Introduction to Surface-Micromachining
General Material Designation
[Book]
First Statement of Responsibility
by Robert W. Johnstone, M. Parameswaran.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston, MA
Name of Publisher, Distributor, etc.
Springer US
Date of Publication, Distribution, etc.
2004
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
(xiii, 189 pages)
CONTENTS NOTE
Text of Note
1. Introduction --;1.1 Why miniaturize? --;1.2 Why surface-micromachining? --;1.3 History --;References --;I Fabrication --;2. Microfabrication Processes --;3. Micromachining Technologies --;II Design --;4. Microscale Physics --;5. Mechanics --;6. Design Rules --;7. Non-Ideal Processes --;8. Design Techniques --;III Devices --;9. Electrical Components --;10. Mechanical Components --;11. Electrostatic Actuators --;12. Electro-Thermal-Compliant Actuators --;13. Raised Structures --;IV Processes --;14. PolyMUMPsTM Process --;15. SUMMiTTM Process --;16. MUSiC® Process.
SUMMARY OR ABSTRACT
Text of Note
Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components.
TOPICAL NAME USED AS SUBJECT
Computer engineering.
Engineering.
Mechanical engineering.
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TJ1191
.
5
Book number
B976
2004
PERSONAL NAME - PRIMARY RESPONSIBILITY
by Robert W. Johnstone, M. Parameswaran.
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
M Parameswaran
Robert W Johnstone
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
