Database needs for modeling and simulation of plasma processing
General Material Designation
[Book]
First Statement of Responsibility
Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Washington, D.C. :
Name of Publisher, Distributor, etc.
National Academy Press,
Date of Publication, Distribution, etc.
1996.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
64 p. ;
Dimensions
28 cm.
SERIES
Series Title
The compass series.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references.
REPRODUCTION NOTE
Text of Note
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