عنوان
پدید آورنده
موضوع
رده
TA2020 .H37 1990eb
TA2020
.
H37
1990eb
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0815512201
(Number (ISBN
1591242975 (electronic bk.)
(Number (ISBN
9780815512202
(Number (ISBN
9781591242970 (electronic bk.)
NATIONAL BIBLIOGRAPHY NUMBER
Number
b501881
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Handbook of plasma processing technology
General Material Designation
[Book]
Other Title Information
fundamentals, etching, deposition, and surface interactions /
First Statement of Responsibility
edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Park Ridge, N.J. :
Name of Publisher, Distributor, etc.
Noyes Publications,
Date of Publication, Distribution, etc.
c1990.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource (xxiii, 523 p.) :
Other Physical Details
ill.
SERIES
Series Title
Materials science and process technology series.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
SUMMARY OR ABSTRACT
Text of Note
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
OTHER EDITION IN ANOTHER MEDIUM
Title
Handbook of plasma processing technology.
International Standard Book Number
0815512201
TOPICAL NAME USED AS SUBJECT
Plasma engineering.
Plasma etching.
Semiconductors-- Etching.
DEWEY DECIMAL CLASSIFICATION
Number
621
.
044
Edition
22
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA2020
Book number
.
H37
1990eb
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Cuomo, J. J.
Rossnagel, Stephen M.
Westwood, William D., (William Dickson),1937-
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
Knovel (Firm)
ORIGINATING SOURCE
Date of Transaction
20131119105445.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
