عنوان

Plasma processes for semiconductor fabrication /

(Number (ISBN

9780511529511 (ebook)

Erroneous ISBN

9780521018005 (paperback)

Erroneous ISBN

9780521591751 (hardback)

Number

b504166

Title Proper

Plasma processes for semiconductor fabrication /

General Material Designation

[Book]

First Statement of Responsibility

W.N.G. Hitchon.

Place of Publication, Distribution, etc.

Cambridge :

Name of Publisher, Distributor, etc.

Cambridge University Press,

Date of Publication, Distribution, etc.

1999.

Specific Material Designation and Extent of Item

1 online resource (ix, 221 pages) :

Other Physical Details

digital, PDF file(s)

Series Title

Cambridge studies in semiconductor physics and microelectronic engineering ;

Volume Designation

8.

Text of Note

Title from publisher's bibliographic system (viewed on 05 Oct 2015)

Text of Note

1. Introduction -- 2. Plasma Processes for Semiconductors -- 3. Plasma Electromagnetics and Circuit Models -- 4. Plasma Models -- 5. Plasma Chemistry -- 6. Transport at Long Mean Free Path -- 7. Evolution of the Trench -- 8. Physical Description of the Plasma -- 9. Going Further.

0

Text of Note

Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. The author begins with an overview of plasma reactors, and discusses the various models for understanding plasma processes. He then covers plasma chemistry, and describes in detail the modelling of complex plasma systems, with reference to experimental results. The book closes with a useful glossary of technical terms. No prior knowledge of plasma physics is assumed in the book. It contains many exercises and will serve as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science. It will also be a useful reference for practising engineers in the semiconductor industry.

Plasma etching.

Semiconductors-- Etching.

Class number

Book number

Hitchon, W. Nicholas G.

Date of Transaction

20151005020622.0

Cataloguing Rules (Descriptive Conventions))

rda

Electronic name

[Book]

Y