عنوان

Integration of functional oxides with semiconductors /

(Number (ISBN

146149320X (electronic bk.)

(Number (ISBN

9781461493204 (electronic bk.)

Erroneous ISBN

1461493196

Erroneous ISBN

9781461493198

Number

dltt

Title Proper

Integration of functional oxides with semiconductors /

General Material Designation

[Book]

First Statement of Responsibility

by Alexander A. Demkov, Agham B. Posadas

Specific Material Designation and Extent of Item

1 online resource

Text of Note

Includes bibliographical references

Text of Note

Introduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices

0

Text of Note

This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges, and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. This book also: Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices Provides a brief introduction to the methods accessible to non-experts, before going into details of interest to the experts Includes a detailed glossary that explains the specialized terminology and provides insight into the terminology and how its used

Title

Integration of functional oxides with semiconductors

International Standard Book Number

9781461493198

Epitaxy.

Metal oxide semiconductors.

Oxide coating.

TEC-- 009070

Number

Edition

Class number

Demkov, Alexander A.

Posadas, Agham B.

Ohio Library and Information Network.

Date of Transaction

20150224074510.0

Cataloguing Rules (Descriptive Conventions))

pn

Electronic name

[Book]

Y