عنوان
پدید آورنده
موضوع
رده
QD121
QD121
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
1118642562 (electronic bk.)
(Number (ISBN
1118642775 (electronic bk.)
(Number (ISBN
1299804640 (MyiLibrary)
(Number (ISBN
9781118642566 (electronic bk.)
(Number (ISBN
9781118642771 (electronic bk.)
(Number (ISBN
9781299804647 (MyiLibrary)
Erroneous ISBN
1118065662
Erroneous ISBN
1118642570
Erroneous ISBN
9781118065662
Erroneous ISBN
9781118642573
NATIONAL BIBLIOGRAPHY NUMBER
Number
dltt
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Trace analysis of specialty and electronic gases /
General Material Designation
[Book]
First Statement of Responsibility
edited by William M. Geiger, Mark W. Raynor.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource (xxxv, 349 pages) :
Other Physical Details
illustrations
GENERAL NOTES
Text of Note
Appendix A: Cylinder and Specialized Fittings
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index
CONTENTS NOTE
Text of Note
Cover; Half Title page; Title page; Copyright page; Contributors; List of Figures; List of Tables; Foreword; Acknowledgments; Acronyms; Chapter 1: Introduction to Gas Analysis: Past and Future; 1.1 The Beginning; 1.2 Gas Chromatography; 1.3 Ion Chromatography; 1.4 Mass Spectrometry; 1.5 Ion Mobility Spectrometry; 1.6 Optical Spectroscopy; 1.7 Metals Analysis; 1.8 Species-Specific Analyzers; 1.9 Sensors; 1.10 The Future; References; Chapter 2: Sample Preparation and ICP-MS Analysis of Gases for Metals; 2.1 Introduction; 2.2 Extraction of Impurities Before Analysis; 2.3 Direct Analysis of ESGs
Text of Note
2.4 ConclusionsReferences; Chapter 3: Novel Improvements in FTIR Analysis of Specialty Gases; 3.1 Gas-Phase Analysis Using FTIR Spectroscopy; 3.2 Gas-Phase Effects on Spectral Line Shape; 3.3 Factors That Greatly Affect Quantification; 3.4 Future Applications; References; Chapter 4: Emerging Infrared Laser Absorption Spectroscopic Techniques for Gas Analysis; 4.1 Introduction; 4.2 Laser Absorption Spectroscopic Techniques; 4.3 Applications of Semiconductor LAS-Based Trace Gas Sensor Systems; 4.4 Conclusions and Future Trends; References
Text of Note
8.5 The Future8.6 Conclusions; References; Chapter 9: Gas Mixtures and Standards; 9.1 Introduction; 9.2 Definition of Gas Standards; 9.3 Cylinders and Valves: Sizes, Types, and Material Compositions; 9.4 Preparation Techniques for Gas Standards; 9.5 Pressure Restrictions and Compressibility Considerations; 9.6 Multicomponent Standards: General Considerations; 9.7 Cylinder Standard Stability Consideration; 9.8 Liquefied Compressed Gas Standards: Preparation Differences and Uses; 9.9 Cylinder Standard Alternatives; 9.10 Dilution Devices and Calibration Uses; References
Text of Note
Chapter 5: Atmospheric Pressure Ionization Mass Spectrometry for Bulk and Electronic Gas Analysis5.1 Introduction; 5.2 APIMS Operating Principle; 5.3 Point-to-Plane Corona Discharge Ionization; 5.4 Factors Affecting Sensitivity in Point-to-Plane Corona Discharge APIMS; 5.5 Applications of Point-to-Plane Corona Discharge APIMS in Bulk and Electronic Gases; 5.6 Nickel-63 Beta Emitter APIMS; 5.7 Specialty Gas Analysis Application: Determination of Oxygenated Impurities in High-Purity Ammonia; 5.8 Conclusions; References
Text of Note
Chapter 6: GC/MS, GC/AED, and GC-ICP-MS Analysis of Electronic Specialty Gases6.1 Introduction; 6.2 GC/MS; 6.3 GC/AED; 6.4 GC-ICP-MS; 6.5 Conclusions; References; Chapter 7: Trace Water Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches; 7.1 Introduction; 7.2 Primary Standards for Water Vapor Measurement; 7.3 Sensor Technologies; 7.4 Spectroscopic Methods; 7.5 Conclusions; References; Chapter 8: Gas Chromatographic Column Considerations; 8.1 Introduction; 8.2 Column Considerations with Packed Columns; 8.3 Primary Selection Criteria for Capillary Columns; 8.4 Applications
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SUMMARY OR ABSTRACT
Text of Note
Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique
OTHER EDITION IN ANOTHER MEDIUM
Title
Trace Analysis of Specialty and Electronic Gases.
International Standard Book Number
9781118065662
TOPICAL NAME USED AS SUBJECT
Gases-- Analysis.
Gases-- Spectra.
Trace elements-- Analysis.
Gases-- Analysis.
Gases-- Spectra.
Trace elements-- Analysis.
(SUBJECT CATEGORY (Provisional
SCI-- 013010
DEWEY DECIMAL CLASSIFICATION
Number
543
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QD121
PERSONAL NAME - PRIMARY RESPONSIBILITY
Geiger, William M.,1948-
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Raynor, Mark W.,1961-
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
Ohio Library and Information Network.
Wiley Online Library (Online service)
ORIGINATING SOURCE
Date of Transaction
20131016151207.0
Cataloguing Rules (Descriptive Conventions))
rda
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
