عنوان

Handbook of cleaning for semiconductor manufacturing :

(Number (ISBN

0470625953

(Number (ISBN

1118071743 (electronic bk.)

(Number (ISBN

9780470625958

(Number (ISBN

9781118071748 (electronic bk.)

Number

dltt

Title Proper

Handbook of cleaning for semiconductor manufacturing :

General Material Designation

[Book]

Other Title Information

fundamentals and applications /

First Statement of Responsibility

Karen A. Reinhardt, Richard F. Reidy

Place of Publication, Distribution, etc.

Hoboken, N.J. :

Name of Publisher, Distributor, etc.

John Wiley & Sons, Inc.,

Date of Publication, Distribution, etc.

c2011

Specific Material Designation and Extent of Item

xxii, 590 p. :

Other Physical Details

ill. ;

Dimensions

26 cm

Text of Note

Includes bibliographical references and index

Text of Note

Fundamentals. Surface and Colloidal Chemical Aspects of Wet Cleaning / Srini Raghavan, Manish Keswani, Nandini Venkataraman -- The Chemistry of Wet Cleaning / D Martin Knotter -- The Chemistry of Wet Etching / D Martin Knotter -- Surface Phenomena: Rinsing and Drying / Karen A Reinhardt, Richard F Reidy, John A Marsella -- Fundamental Design of Chemical Formulations / Robert J Rovito, Michael B Korzenski, Ping Jiang, Karen A Reinhardt -- Filtering, Recirculating, Reuse, and Recycling of Chemicals / Barry Gotlinsky, Kevin T Pate, Donald C Grant -- Applications. Cleaning Challenges of High-k/Metal Gate Structures / Muhammad M Hussain, Denis Shamiryan, Vasile Paraschiv, Kenichi Sano, Karen A Reinhardt -- High Dose Implant Stripping / Karen A Reinhardt, Michael B Korzenski -- Aluminum Interconnect Cleaning and Drying / David J Maloney -- Low-k/Cu Cleaning and Drying / Karen A Reinhardt, Richard F Reidy, Jerome Daviot -- Corrosion and Passivation of Copper / Darryl W Peters -- Germanium Surface Conditioning and Passivation / Sonja Sioncke, Yves J Chabal, Martin M Frank -- Wafer Reclaim / Michael B Korzenski, Ping Jiang -- Direct Wafer Bonding Surface Conditioning / Hubert Moriceau, Yannick C Le Tiec, Frank Fournel, Ludovic F L Ecarnot, Sebastien L E Kerdil̈s, Daniel Delprat, Christophe Maleville -- New Directions. Novel Analytical Methods for Cleaning Evaluation / Chris M Sparks, Alain C Diebold -- Stripping and Cleaning for Advanced Photolithography Applications / John A Marsella, Dana L Durham, Leslie D Molnar

0

Semiconductors-- Surfaces-- Cleaning

Class number

Book number

Reinhardt, Karen A

Reidy, Richard F.,1960-

Date of Transaction

20110812071703.0

Electronic name

[Book]

Y