عنوان
پدید آورنده
موضوع
رده
QC176.A1 P53 v.27
QC176
.
A1
P53
v
.
27
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0125330278
(Number (ISBN
9780125330275
NATIONAL BIBLIOGRAPHY NUMBER
Number
dltt
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Ionized physical vapor deposition /
General Material Designation
[Book]
First Statement of Responsibility
edited by Jeffrey A. Hopwood.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
San Diego :
Name of Publisher, Distributor, etc.
Academic Press,
Date of Publication, Distribution, etc.
c2000.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 253 p. :
Other Physical Details
ill. ;
Dimensions
24 cm.
SERIES
Series Title
Thin films ;
Volume Designation
v. 27
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and indexes.
CONTENTS NOTE
Text of Note
The role of ionized physical vapor deposition in integrated circuit fabrication / Jeffrey A. Hopwood -- High-density plasma sources / Amy E. Wendt -- Ionization by radio freguency inductively coupled plasma / Steve Rossnagel -- Ionization by microwave electron cyclotron resonance plasma / William M. Holber -- Ionized hollow cathode magnetron sputtering / Kwok F. Lai -- Applications and properties of ionized physical vapor deposition films / John Forster -- Plasma physics / Jeffrey A. Hopwood -- Numerical modeling / Ming Li, Michael A. Vyvoda, and David B. Graves.
0
TOPICAL NAME USED AS SUBJECT
Physical vapor deposition.
Thin film devices-- Design and construction.
Thin films.
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC176
.
A1
Book number
P53
v
.
27
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Hopwood, Jeffrey A.
ORIGINATING SOURCE
Date of Transaction
20140220045959.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
