عنوان
پدید آورنده
موضوع
رده
TA418.9.T45 O47 2002
TA418
.
9
.
T45
O47
2002
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0080491782
(Number (ISBN
9780080491783
Erroneous ISBN
9780125249751
NATIONAL BIBLIOGRAPHY NUMBER
Number
dltt
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Materials science of thin films
General Material Designation
[Book]
Other Title Information
deposition and structure /
First Statement of Responsibility
Milton Ohring
EDITION STATEMENT
Edition Statement
2nd ed
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
San Diego, CA :
Name of Publisher, Distributor, etc.
Academic Press,
Date of Publication, Distribution, etc.
c2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource (1 v.) :
Other Physical Details
ill
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index
CONTENTS NOTE
Text of Note
A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chemical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterization of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films
0
ACQUISITION INFORMATION NOTE
Source for Acquisition/Subscription Address
Safari Books Online
Stock Number
CL0500000178
OTHER EDITION IN ANOTHER MEDIUM
Title
Materials science of thin films.
International Standard Book Number
0125249756
TOPICAL NAME USED AS SUBJECT
Thin films
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA418
.
9
.
T45
Book number
O47
2002
PERSONAL NAME - PRIMARY RESPONSIBILITY
Ohring, Milton,1936-
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
Ohio Library and Information Network
ORIGINATING SOURCE
Date of Transaction
20121203160638.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
