عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0852960395
NATIONAL BIBLIOGRAPHY NUMBER
Number
dltt
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Silicon wafer bonding technology :
General Material Designation
[Book]
Other Title Information
for VLSI and MEMS applications /
First Statement of Responsibility
edited by Subramanian S. Iyer and Andre J. Auberton-Hervé
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
London :
Name of Publisher, Distributor, etc.
Institution of Electrical Engineers,
Date of Publication, Distribution, etc.
c2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxv, 149 p. :
Other Physical Details
ill. ;
Dimensions
26 cm
SERIES
Series Title
EMIS processing series ;
ISSN of Series
no. 1
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Integrated circuits-- Very large scale integration
Microelectromechanical systems
Silicon-on-insulator technology
DEWEY DECIMAL CLASSIFICATION
Number
621
.
38152
Edition
21
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Auberton-Hervé, Andre J
Iyer, Subramanian S
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
INSPEC., EMIS Group
Institution of Electrical Engineers
ORIGINATING SOURCE
Date of Transaction
20030630095434.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
