عنوان

A guide to hands-on MEMS design and prototyping /

(Number (ISBN

0521889251 (hardback)

(Number (ISBN

1107645794 (pbk.)

(Number (ISBN

9780521889254 (hardback)

(Number (ISBN

9781107645790 (pbk.)

Number

dltt

Title Proper

A guide to hands-on MEMS design and prototyping /

General Material Designation

[Book]

First Statement of Responsibility

Joel Kubby

Place of Publication, Distribution, etc.

New York :

Name of Publisher, Distributor, etc.

Cambridge University Press,

Date of Publication, Distribution, etc.

2011

Specific Material Designation and Extent of Item

xi, 166 p., [16] p. of plates :

Other Physical Details

ill. (some col.) ;

Dimensions

24 cm

Text of Note

Includes bibliographical references and index

Text of Note

Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics

8

Text of Note

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--

Text of Note

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--

Microelectromechanical systems

Number

Edition

Class number

Book number

Kubby, Joel A

Date of Transaction

20111110005811.0

Electronic name

[Book]

Y