عنوان
پدید آورنده
موضوع
رده
TS695 .W37 2012
TS695
.
W37
2012
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
1437734839
(Number (ISBN
9781437734836
NATIONAL BIBLIOGRAPHY NUMBER
Number
b430368
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Handbook of sputter deposition technology :
General Material Designation
[Book]
Other Title Information
fundamentals and applications for functional thin films, nano-materials and MEMS /
First Statement of Responsibility
edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera
EDITION STATEMENT
Edition Statement
2nd ed
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Waltham, MA :
Name of Publisher, Distributor, etc.
William Andrew,
Date of Publication, Distribution, etc.
2012
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 644 p. :
Other Physical Details
ill. ;
Dimensions
24 cm
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Cathode sputtering (Plating process), Handbooks, manuals, etc
Thin films, Handbooks, manuals, etc
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS695
Book number
.
W37
2012
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Kanno, Isaku
Kotera, Hidetoshi
Wasa, Kiyotaka
ORIGINATING SOURCE
Date of Transaction
20130211232032.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
