عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9783642559082
(Number (ISBN
9783642632211
NATIONAL BIBLIOGRAPHY NUMBER
Number
b407327
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Low Dielectric Constant Materials for IC Applications
General Material Designation
[Book]
First Statement of Responsibility
edited by Paul S. Ho, Jihperng Jim Leu, Wei William Lee.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin, Heidelberg :
Name of Publisher, Distributor, etc.
Imprint: Springer,
Date of Publication, Distribution, etc.
2003.
SERIES
Series Title
Springer Series in Advanced Microelectronics,
Volume Designation
9
ISSN of Series
1437-0387 ;
CONTENTS NOTE
Text of Note
Overview on Low Dielectric Constant Materials for IC Applications -- Materials Issues and Characterization of Low-k Dielctric Materials -- Structure and Property Characterization of Low-k Dielectric Porous Thin Films Determined by X-Ray Reflactivity and Small-Angle Neutron Scattering -- Vapor Deposition of Low-k Polymeric Dielectrics -- Plasma Enhanced Chemical Vapor Deposition of FSG and a-C: Low-k Materials -- Porous Organosilicates for ON-Chip Applications: Dielectric Generational Extendibility by the Introduction of Porosity -- Metal/Polymer Interfacial Interactions -- Diffusion of Metals in Polymers and During Metal-Polymer Interface Formation -- Plasma Etching of Low Dielectric Constant Materials -- Integration of SiLK Semiconductor Dielectric.
0
SUMMARY OR ABSTRACT
Text of Note
Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for < 0.18 um process technology. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability. This volume will be an invaluable resource for professionals, scientists, researchers and graduate students involved in dielectric technology development, materials science, polymer science, and semiconductor devices and processing.
OTHER EDITION IN ANOTHER MEDIUM
International Standard Book Number
9783642632211
PIECE
Title
Springer eBooks
TOPICAL NAME USED AS SUBJECT
Electronics.
Optical materials.
Surfaces (Physics).
PERSONAL NAME - PRIMARY RESPONSIBILITY
Ho, P. S.
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Lee, Wei William.
Leu, Jihperng Jim.
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
SpringerLink (Online service)
ORIGINATING SOURCE
Date of Transaction
20190307155100.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
