by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin, Heidelberg :
Name of Publisher, Distributor, etc.
Imprint: Springer,
Date of Publication, Distribution, etc.
2000.
SERIES
Series Title
Springer Series in ADVANCED MICROELECTRONICS,
Volume Designation
2
ISSN of Series
1437-0387 ;
CONTENTS NOTE
Text of Note
Introduction -- Basic Principles of Integrated Circuit Technology -- Film Technology -- Lithography -- Etching Technology -- Doping Technology -- Cleaning Technology -- Process Integration.
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SUMMARY OR ABSTRACT
Text of Note
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.