عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9781489918048
(Number (ISBN
9781489918062
NATIONAL BIBLIOGRAPHY NUMBER
Number
b404838
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Rapid Thermal Processing of Semiconductors
General Material Designation
[Book]
First Statement of Responsibility
by Victor E. Borisenko, Peter J. Hesketh.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston, MA :
Name of Publisher, Distributor, etc.
Imprint: Springer,
Date of Publication, Distribution, etc.
1997.
SERIES
Series Title
Microdevices, Physics and Fabrication Technologies
CONTENTS NOTE
Text of Note
1. Transient Heating of Semiconductors by Radiation -- 2. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals -- 3. Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon -- 4. Component Evaporation, Defect Annealing, and Impurity Diffusion in the III-V Semiconductors -- 5. Diffusion Synthesis of Silicides in Thin-Film Metal-Silicon Structures -- 6. Rapid Thermal Oxidation and Nitridation -- 7. Rapid Thermal Chemical Vapor Deposition -- References.
0
SUMMARY OR ABSTRACT
Text of Note
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
OTHER EDITION IN ANOTHER MEDIUM
International Standard Book Number
9781489918062
PIECE
Title
Springer eBooks
TOPICAL NAME USED AS SUBJECT
Optical materials.
PERSONAL NAME - PRIMARY RESPONSIBILITY
Borisenko, V. E., (Viktor Evgenʹevich)
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Hesketh, Peter J.
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
SpringerLink (Online service)
ORIGINATING SOURCE
Date of Transaction
20190307161400.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
