The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2
General Material Designation
[Book]
First Statement of Responsibility
edited by C. Robert Helms, Bruce E. Deal.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston, MA :
Name of Publisher, Distributor, etc.
Imprint: Springer,
Date of Publication, Distribution, etc.
1993.
OTHER EDITION IN ANOTHER MEDIUM
International Standard Book Number
9781489915900
PIECE
Title
Springer eBooks
PARALLEL TITLE PROPER
Parallel Title
Proceedings of the Electronics and Dielectrics Science Divisions of the Electrochemical Society's Second Symposium on the Physics and Chemistry of the SiO2 and the Si-SiO2 Interface held in St. Louis, Missouri, May 18-21, 1992