عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9781461373537
(Number (ISBN
9781461551676
NATIONAL BIBLIOGRAPHY NUMBER
Number
b403341
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Bringing Scanning Probe Microscopy up to Speed
General Material Designation
[Book]
First Statement of Responsibility
by S. C. Minne, S. R. Manalis, C. F. Quate.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston, MA :
Name of Publisher, Distributor, etc.
Imprint: Springer,
Date of Publication, Distribution, etc.
1999.
SERIES
Series Title
Microsystems,
Volume Designation
3
ISSN of Series
1389-2134 ;
SUMMARY OR ABSTRACT
Text of Note
Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.
OTHER EDITION IN ANOTHER MEDIUM
International Standard Book Number
9781461373537
PIECE
Title
Springer eBooks
TOPICAL NAME USED AS SUBJECT
Computer engineering.
Optical materials.
Surfaces (Physics).
PERSONAL NAME - PRIMARY RESPONSIBILITY
Minne, S. C.
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Manalis, S. R.
Quate, C. F.
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
SpringerLink (Online service)
ORIGINATING SOURCE
Date of Transaction
20190301075100.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
