عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0444599800
(Number (ISBN
9780444599803
Erroneous ISBN
0444899944
Erroneous ISBN
9780444899941
NATIONAL BIBLIOGRAPHY NUMBER
Number
b401416
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Ion implantation technology-92
General Material Designation
[Book]
Other Title Information
proceedings of the Ninth International Conference on Ion Implantation Technology, Gainesvile, FL, USA, September 20-24, 1992 /
First Statement of Responsibility
editors, D.F. Downey ... [et al.].
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York :
Name of Publisher, Distributor, etc.
North-Holland,
Date of Publication, Distribution, etc.
1993.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource (xvii, 697 p.) :
Other Physical Details
ill.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
SUMMARY OR ABSTRACT
Text of Note
Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wide application of ion implantation, as well as exploitation of newly identified opportunities, will require the development of comprehensive implant models. The 141 papers (including 24 invited papers) in this volume address the most recent developments in this field. New structures and possible approaches are described. The implications for ion implantation technology as well as additional observations of needs and opportunities are discussed. The volume will be of value to all those who are interested in acquiring a more complete understanding of the current developments in ion implantation processes and comprehensive implant models.
OTHER EDITION IN ANOTHER MEDIUM
Title
Ion implantation technology-92.
International Standard Book Number
0444899944
TOPICAL NAME USED AS SUBJECT
Ion implantation, Congresses.
Semiconductor doping, Congresses.
Semiconductors, Congresses.
TECHNOLOGY & ENGINEERING / Electronics / Semiconductors.
TECHNOLOGY & ENGINEERING / Electronics / Solid State.
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Downey, D. F.
CORPORATE BODY NAME - PRIMARY RESPONSIBILITY
International Conference on Ion Implantation Technology(9th :1992 :, Gainesville, Fla.)
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
ScienceDirect (Online service)
ORIGINATING SOURCE
Date of Transaction
20140923085400.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
