عنوان
پدید آورنده
موضوع
رده
E-Book ,
E-Book
,
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
:9783662443941
NATIONAL BIBLIOGRAPHY NUMBER
Number
38955
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Micro and Nano Fabrication
General Material Designation
[electronic resources]
Other Title Information
: Tools and Processes
First Statement of Responsibility
\ Hans H. Gatzen, Volker Saile, Jurg Leuthold; With a Foreward and an Introduction by Richard S. Muller
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin
Name of Publisher, Distributor, etc.
: Springer
Date of Publication, Distribution, etc.
, 2015
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxvi, 519p.
Other Physical Details
:ill.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Index
Text of Note
Bibliography
TOPICAL NAME USED AS SUBJECT
Microelectromechanical systems
Nanotechnology and Microengineering
سیستمهای میکروالکترومکانیکی
LIBRARY OF CONGRESS CLASSIFICATION
E-Book
,
PERSONAL NAME - PRIMARY RESPONSIBILITY
Gatzen, Hans-Heinrich
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Saile, Volker
Leuthold, Jurg
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Date and Hour of Consultation and Access
9783662443941.pdf
BL
279177
1
a
N
