عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .R863 2001
TK
7871
.
85
.
R863
2001
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
electronic
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Run-to-run control in semiconductor manufacturing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC Press
Date of Publication, Distribution, etc.
2001
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
348 p. : ill. ; 24 cm
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz
TOPICAL NAME USED AS SUBJECT
Entry Element
Design and construction ، Semiconductors
Entry Element
Production control ، Semiconductor industry
Entry Element
، Electronic packaging
Entry Element
، Production management
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
R863
2001
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Moyne, James
AU Del Castillo, Enrique
AU Hurwitz, Arnon Max
