عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .A33 2016
TK
7871
.
85
.
A33
2016
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
electronic
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Advances in chemical mechanical planarization )CMP(
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxiii, 511 pages : illustrations ; 24 cm
SERIES
Series Title
Woodhead Publishing series in electronic and optical materials ;no. 68.
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by Suryadevara Babu
TOPICAL NAME USED AS SUBJECT
Entry Element
، Chemical mechanical planarization
Entry Element
، Nanoelectronics
Entry Element
، Microelectronics
Entry Element
، Chemical mechanical planarization
Entry Element
، Microelectronics
Entry Element
، Nanoelectronics
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
A33
2016
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Babu, Suryadevara V editor
SE
SE Woodhead Publishing series in electronic and optical materials
