عنوان
پدید آورنده
موضوع
رده
TK .M555 7871.85 1993
TK
.
M555
7871
.
85
1993
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Process engineering analysis in semiconductor device fabrication
First Statement of Responsibility
Stanley Middleman, Arthur K. Hochberg
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
McGraw-Hill
Date of Publication, Distribution, etc.
1993
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xvii, 774 p. : ill. ; 25 cm
SERIES
Series Title
McGraw-Hill chemical engineering series
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Semiconductors - Design and construction
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
Classification Record Number
7871
.
85
Book number
.
M555
1993
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Middleman, Stanley.
Entry Element
Title
Hochberg, Arthur K
.joint author
English Book
