عنوان
پدید آورنده
موضوع
رده
TK 7871.15 .F5 K58 2005
TK
7871
.
15
.
F5
K58
2005
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
6042a
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Konuma, Mitsuharu
Title Proper by Another Author
0591-
Title Proper
Plasma techniques for film deposition
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Harrow, U. K.
Name of Publisher, Distributor, etc.
Alpha Science International Ltd.
Date of Publication, Distribution, etc.
2005
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
ix, 337 p. : ill. ; 25 cm
GENERAL NOTES
Text of Note
Includes bibliographical references )p. 273-323( and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Mitsuharu Konuma
TOPICAL NAME USED AS SUBJECT
Entry Element
، Plasma-enhanced chemical vapor deposition
Entry Element
، Thin films
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
15
.
F5
K58
2005
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AT Film deposition by plasma techniques urahustiM ,amunoK 1950-
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
که فیزیه دانشکدانابخکت
