عنوان
پدید آورنده
موضوع
رده
TK 7874 .W67 1989
TK
7874
.
W67
1989
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
3458a
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Microlithography : high integration in microelectronics : proceedings of the First Workshop Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Singapore
Name of Publisher, Distributor, etc.
World Scientific
Date of Publication, Distribution, etc.
c1990
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
viii, 184 p. : ill. ; 24 cm
GENERAL NOTES
Text of Note
Includes bibliographical references
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Editors, Aldo Craivich, G. Gerson Bezerra de Souza, Vitor Baranauskas
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Microelectronics
Entry Element
Congresses ، Microlithography
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
W67
1989
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU odlA ,hciveiarC ed.
AU ed arrezeB nosreG .G ,azuoS ed.
AU rotiV ,saksuanaraB ed.
TI
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
Workshop on "Microlithography : High Integration in Microelectronics" )1st : 1989 : Rio de Janeiro(
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
که فیزیه دانشکدانابخکت
