عنوان
پدید آورنده
موضوع
رده
QC 718.5 .D9 L54 1994
QC
718
.
5
.
D9
L54
1994
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
71823
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Lieberman, Michael A
Title Proper
Principles of plasma discharges and materials processing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Wiley
Date of Publication, Distribution, etc.
1994
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxvi, 572 p. : ill. ; 25 cm
GENERAL NOTES
Text of Note
A Wiley-Interscience publication
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Michael A. Lieberman, Allan J. Lichtenberg
TOPICAL NAME USED AS SUBJECT
Entry Element
، Plasma dynamics
Entry Element
، Thin films -- Surfaces
Entry Element
، Plasma etching
Entry Element
، Plasma chemistry
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC
718
.
5
.
D9
L54
1994
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU J nallA ,grebnethciL joint auth.
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
که فیزیه دانشکدانابخکت
