عنوان
پدید آورنده
موضوع
رده
TK 7871.15 .P6 P635 1989
TK
7871
.
15
.
P6
P635
1989
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
57398
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Polymers in microlithography : materials and processes
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Washington, DC
Name of Publisher, Distributor, etc.
American Chemical Society
Date of Publication, Distribution, etc.
1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 449 p. : ill. ; 24 cm
SERIES
Series Title
ACS symposium series, 7900-6516, 214
GENERAL NOTES
Text of Note
Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989
Text of Note
Includes bibliographical references
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Polymers
Entry Element
Congresses ، Photoresists
Entry Element
Materials -- Congresses ، Microlithography
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
15
.
P6
P635
1989
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU aslE ,sinamhcieR ed. 1953-
AU A ttocS ,dlanoDcaM ed.
AU oakaT ,iganayawI ed. 1949-
CO American Chemical Society, Division of Polymeric Materials: Science and Engineering
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
مس علوه مرکزی پردیانابخکت
