عنوان
پدید آورنده
موضوع
رده
TK 7872. H35 2010
TK
7872
.
H35
2010
کتابخانه
محل استقرار
استان: Khorasan Razavi ـ شهر: Mashhad
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Handbook of silicon based MEMS materials & technologies
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Norwich, N.Y. : Elsevier Science ]distributor[
Name of Publisher, Distributor, etc.
William Andrew ; Oxford
Date of Publication, Distribution, etc.
2010
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource.
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
by Veikko Lindroos ... ]et al.[
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectromechanical systems
Entry Element
Materials ، Microelectromechanical systems
Entry Element
Electric properties ، Silicon
DEWEY DECIMAL CLASSIFICATION
Number
621
.
38152
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7872
.
H35
2010
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Lindroos, Veikko
