عنوان
پدید آورنده
موضوع
رده
TK 7874 .W635
TK
7874
.
W635
کتابخانه
محل استقرار
استان: Khorasan Razavi ـ شهر: Mashhad
OTHER STANDARD IDENTIFIER
Standard Number
61648
Standard Number
61649
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Wolf, Stanley
Title Proper
Silicon processing for the VLSI Era
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Sunset Beach, Calif.
Name of Publisher, Distributor, etc.
Lattice Press
Date of Publication, Distribution, etc.
1995- .
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
v.: ill
GENERAL NOTES
Text of Note
Includes index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Stanley Wolf
CONTENTS NOTE
Text of Note
v.1. Process technology - v.2. Process integration - v.3. The submicron mosfet
TOPICAL NAME USED AS SUBJECT
Entry Element
Etching ، Semiconductors
Entry Element
Very large scale integration ، Integrated circuits
Entry Element
، Silicon
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
W635
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
TI
LOCATION AND CALL NUMBER
Call Number Suffix
CL
Call Number Suffix
CL
