عنوان
پدید آورنده
موضوع
رده
TK 7875 .E49 2001
TK
7875
.
E49
2001
کتابخانه
محل استقرار
استان: Khorasan Razavi ـ شهر: Mashhad
OTHER STANDARD IDENTIFIER
Standard Number
58768
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Elwenspoek, Miko
Title Proper by Another Author
8491-
Title Proper
Mechanical microsensors
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin
Name of Publisher, Distributor, etc.
Springer
Date of Publication, Distribution, etc.
c2001
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 295p.: ill
SERIES
Series Title
Microtechnology and MEMS
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
M. Elwenspoek, R. Wiegerink
TOPICAL NAME USED AS SUBJECT
Entry Element
Design and construction ، Detectors
Entry Element
Design and construction ، Microelectromechanical systems
Entry Element
، Transducers
Entry Element
، Silicon
Entry Element
، Micromachining
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7875
.
E49
2001
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU Wiegerink, Remco J. 1964- .
TI
SE
LOCATION AND CALL NUMBER
Call Number Suffix
CL
