Microelectronic materials and processes: )Proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes, I1 Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986(
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht; Boston
Name of Publisher, Distributor, etc.
Kluwer Academic Publishers
Date of Publication, Distribution, etc.
c1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 985p.:ill
SERIES
Series Title
NATO ASI series. Series E, Applied sciences; vol. 461
GENERAL NOTES
Text of Note
Includes bibliographies
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by R.A. Levy
TOPICAL NAME USED AS SUBJECT
Entry Element
، Integrated circuits
Entry Element
Materials - Congresses ، Microelectronics
Entry Element
Very large scale integration - Design and construction - Congresses ، Integrated circuits
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
N339
1986
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU Levy, Roland Albert 1944-
CO North Atlantic Treaty Organization
TI
SE
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
Nato advanced Study Institute on Microelectronic Materials and Processes )1986: I1 Ciocco, Italy(