عنوان
پدید آورنده
موضوع
رده
TK 7874 .E495 1986
TK
7874
.
E495
1986
کتابخانه
محل استقرار
استان: Khorasan Razavi ـ شهر: Mashhad
OTHER STANDARD IDENTIFIER
Standard Number
10890
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Elliott, David J.
Title Proper
Microlithography; Process technology for IC Fabrication
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
McGraw-Hill
Date of Publication, Distribution, etc.
c1986
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix, 378p.:ill
GENERAL NOTES
Text of Note
Includes bibliographies and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
David J. Elliott
TOPICAL NAME USED AS SUBJECT
Entry Element
Very large scale integration - Design and construction ، Integrated circuits
Entry Element
، Microlithography
Entry Element
، Photoresists
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
E495
1986
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
TI
LOCATION AND CALL NUMBER
Call Number Suffix
CL
