عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .S88 1998
TK
7871
.
85
.
S88
1998
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
electronic
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Sugawara, M. )Minoru(
Title Proper
Plasma etching : fundamentals and applications
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Oxford University Press
Date of Publication, Distribution, etc.
1998
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
viii, 347 p. : ill. )some col.( ; 24 cm
SERIES
Series Title
Series on semiconductor science and technology ;7
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
M. Sugawara ; with contributions from Barry L. Stonsfield ... ]et al.[
TOPICAL NAME USED AS SUBJECT
Entry Element
Etching ، Semiconductors
Entry Element
، Plasma etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
S88
1998
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU Stansfield, Barry L
TI
SE
