عنوان
پدید آورنده
موضوع
رده
TK7875 .G66 2014
TK7875
.
G66
2014
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
2147
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Gonza۱جlez Ruiz, Pilar
Title Proper
Poly-SiGe for MEMS-above-CMOS sensors
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht ; New York
Name of Publisher, Distributor, etc.
Springer
Date of Publication, Distribution, etc.
c2014
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource
SERIES
Series Title
Springer series in advanced microelectronics,7341-7830 ;v.44
GENERAL NOTES
Text of Note
Includes bibliographical references
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectromechanical systems
Entry Element
، Metal oxide semiconductors, Complementary
Entry Element
، Polycrystals
DEWEY DECIMAL CLASSIFICATION
Number
621
.
381
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7875
.
G66
2014
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw
AU eD nitsirK ,reyeM
AU nnA ,wuorvtiW
TI
SE
SE Springer series in advanced microelectronics ;
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
لاه دیجیتانابخکت
