عنوان
پدید آورنده
موضوع
رده
QC718.5.D9 L54 ]CD[
QC718
.
5
.
D9
L54
]
CD
[
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
۱۷۶۸
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Lieberman, M. A. ) Michael A.(
Title Proper
Principles of plasma discharges and materials processing]CD[
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Wiley
Date of Publication, Distribution, etc.
c1994
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxvi, 572 p. : ill. ; 25 cm.
GENERAL NOTES
Text of Note
"A Wiley-Interscience publication."
Text of Note
Includes bibliographical references )p. 559-564( and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Plasma dynamics
Entry Element
Surfaces ، Thin films
Entry Element
، Plasma etching
Entry Element
، Plasma chemistry
DEWEY DECIMAL CLASSIFICATION
Number
530
.
4/4
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC718
.
5
.
D9
L54
]
CD
[
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
Michael A. Lieberman, Allan J. Lichtenberg
AU J nallA ,grebnethciL
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
ش دیداری شنیداریبخ
