عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
14280
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Kamins, Theodore I.
Title Proper
Polycrystalline silicon for integrated circuit applications
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston
Name of Publisher, Distributor, etc.
Kluwer Academic Publishers
Date of Publication, Distribution, etc.
c1988
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 290 p. :ill. ;24 cm
SERIES
Series Title
Kluwer international series in engineering and computer science ; SECS 54
GENERAL NOTES
Text of Note
Includes index
Text of Note
Bibliography: p. 249- 280.
TOPICAL NAME USED AS SUBJECT
Entry Element
، Integrated circuits- Materials
Entry Element
، Silicon- Electric properties
DEWEY DECIMAL CLASSIFICATION
Number
621
.
381/71
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
15
.
S55K36
1988
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
by Ted Kamins
TI
