عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
9160
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Chemical vapor deposition : principles and applications
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
London
Name of Publisher, Distributor, etc.
Academic Press
Date of Publication, Distribution, etc.
c1993
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
v, 677 p. :ill. ;24 cm
GENERAL NOTES
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Entry Element
، Chemical vapor deposition
DEWEY DECIMAL CLASSIFICATION
Number
620/
.
44
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS
695
.
C54
1993
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by Michael L. Hitchman and Klavs F. Jensen
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