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عنوان
1993 proceeding advanced and semiconductor manufacturing conferences and workshop)ASMC(;October 18-19,Boston,Masachusth
پدید آورنده
موضوع
، Semiconductors-aDesign and construction-congresses,، Production management-congresses,، Process control-congresses
رده
کتابخانه
Library of Niroo Research Institue
محل استقرار
استان:
Tehran
ـ شهر:
Tehran
تماس با کتابخانه :
9
-
88079401
-
021
OTHER STANDARD IDENTIFIER
Standard Number
13414
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
1993 proceeding advanced and semiconductor manufacturing conferences and workshop)ASMC(;October 18-19,Boston,Masachusth
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
U.S.A.
Name of Publisher, Distributor, etc.
Semiconductor equipment and materials international,Inc
Date of Publication, Distribution, etc.
1993
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
vii,253p.:diag.ill
TOPICAL NAME USED AS SUBJECT
Entry Element
، Semiconductors-aDesign and construction-congresses
Entry Element
، Production management-congresses
Entry Element
، Process control-congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
I4
1993
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
C9onference chair Spitzer Stuait M.
TI
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
IEEE/SEMI Advanced semiconductor manufacturing conference and workshop)4th:1993:Boston(
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