عنوان
پدید آورنده
موضوع
رده
TS 183 .M52 2006
TS
183
.
M52
2006
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
140720
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
تابستان۵۸
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)60(
Title Proper
Micro process engineering: fundamentals, devices, fabrication, and applications
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Weinheim
Name of Publisher, Distributor, etc.
Wiley-VCH
Date of Publication, Distribution, etc.
2006
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxii, 507 p.: ill.; 24 cm
SERIES
Series Title
Advanced micro & nanosystems
ISSN of Series
5
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Production engineering
Entry Element
، Microtechnology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS
183
.
M52
2006
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
volume editor: Norbert Kockmann
AU trebroN ,nnamkcoK
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
06
