عنوان
پدید آورنده
موضوع
رده
TK 7836 .M33 2002
TK
7836
.
M33
2002
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
135808
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
زمستان۲۸
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)80(
First Statement of Responsibility
Madou, Marc J.
Title Proper
Fundamentals of microfabrication: the science of miniaturization
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC Press
Date of Publication, Distribution, etc.
2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
723 p.: col. ill.; 29 cm
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO EDITION AND BIBLIOGRAPHIC HISTORY
Text of Note
2nd ed
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics
Entry Element
، Integrated circuits-- Design and construction
Entry Element
، Microelectromechanical systems-- Design and construction
Entry Element
، Machining
Entry Element
، Microelectronic packaging
Entry Element
، Lasers-- Industrial applications
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7836
.
M33
2002
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
Marc J. Madou
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
08
