عنوان
پدید آورنده
موضوع
رده
TA 418 .9 .T45 .C47 2002
TA
418
.
9
.
T45
.
C47
2002
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
133678
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
بهار۲۸
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)40(
Title Proper
Chemical physics of thin film deposition processes for micro- and nano-technologies
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht
Name of Publisher, Distributor, etc.
Kluwer Academic Publishers
Date of Publication, Distribution, etc.
2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii, 363 p.: ill.; 25 cm
SERIES
Series Title
NATO science series
ISSN of Series
v.55
GENERAL NOTES
Text of Note
"Published in cooperation with NATO Scientific Affairs Division"
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Thin films
Entry Element
Congresses ، Nanotechnology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
418
.
9
.
T45
.
C47
2002
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by Yves Pauleau
AU Y ,uaeluaP
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
04
