MOEMS 99: 3rd International Conference on Micro Opto Electro Mechanical Systems )Optical MEMS(: proceedings: August 31 - September 1, 1999, Mainz Hilton )Mainz, Germany(
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Mainz, Germany
Name of Publisher, Distributor, etc.
IMM
Date of Publication, Distribution, etc.
1999
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
250 p.; ill.; 28 cm
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Microelectromechanical systems
Entry Element
Congresses ، Microfabrication
Entry Element
Congresses ، Optoelectronic devices
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7875
.
M53
1991
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
sponsored by Controlware Gmbh, Dietzenbach, Germany, ... ]et al.[