Materials aspects in microsystem technologies: proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 spring conference, Strasbourg, France, June 16-19, 1998
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amsterdam
Name of Publisher, Distributor, etc.
Elsevier
Date of Publication, Distribution, etc.
1999
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
257 p.; 29 cm
SERIES
Series Title
European Materials Research Society symposia proceedings
ISSN of Series
v.83
GENERAL NOTES
Text of Note
Reprinted from: Sensors and actuators, v.74, no. 1-3, 1999
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Detectors
Entry Element
Congresses ، Microactuators
Entry Element
Congresses ، Microelectromechanical systems
Entry Element
Congresses ، Microelectronics
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
S8772
1998
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by D. Barbier ... ]et al.[
AU (leinaD) .D ,reibraB
CO European Materials Research Society
CO E-MRS Spring Conference )8991: Strasbourg, France(