Materials and processes for submicron technologies: proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June, 1998
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amsterdam
Name of Publisher, Distributor, etc.
Elsevier
Date of Publication, Distribution, etc.
1999
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1175 p.: ill.; 29 cm
SERIES
Series Title
European Materials Research Society symposia proceedings
ISSN of Series
89
GENERAL NOTES
Text of Note
Reprinted from Solid-state electronics, vol. 43, no. 6
Text of Note
Includes bibliographical references and indexes
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Solid state physics
Entry Element
Congresses ، Solid state electronics
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Congresses ، Microstructure
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Congresses ، Nanotechnology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC
610
.
9
.
S952
1998
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
edited by J.M. Martinez-Duart, R. Madar, R.A. Levy
AU .M .J ,trauD-zenitraM
AU .R ,radaM
AU (treblA dnaloR).A dnaloR ,yveL 1944-
CO European Materials Research Society
TI
SE
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
Symposium N on Materials and Processes for Submicron Technologies )1998: Strasbourg, France(