IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems: an investigation of micro structures, sensors, actuators, machines, and systems: proceedings, San Diego, California, USA, February 11-15, 1996
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
]New York[
Name of Publisher, Distributor, etc.
Institute of Electrical and Electronics Engineers
Date of Publication, Distribution, etc.
1996
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxiv, 530 p.: ill.; 30 cm
GENERAL NOTES
Text of Note
"IEEE catalog number 96CH35856"
Text of Note
Includes bibliographical references
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Electromechanical devices
Entry Element
Congresses ، Microelectronics
Entry Element
Congresses ، Detectors
Entry Element
Congresses ، Actuators
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
153
.
I35
1996
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
sponsored by the IEEE Robotics and Automation Society
CO IEEE Robotics and Automation Society
TI
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
IEEE Workshop on Micro Electro Mechanical Systems )9th: 1996: San Diego, Calif.(