عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .S88 1998
TK
7871
.
85
.
S88
1998
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
120856
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
بهار۹۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)50(
First Statement of Responsibility
Sugawara, M.)Minoru(
Title Proper
Plasma etching: fundamentals and applications
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Oxford University Press
Date of Publication, Distribution, etc.
1998
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
viii, 347 p.: ill. )some col.(; 24 cm
SERIES
Series Title
Series on semiconductor science and technology
ISSN of Series
7
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Semiconductors-- Etching
Entry Element
، Plasma etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
S88
1998
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
M. Sugawara ; with contributions from Barry L. Stonsfield ... ]et al.[
AU L yrraB ,dleifsnatS
TI
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
05
