عنوان
پدید آورنده
موضوع
رده
TK 7874 .W67 1989
TK
7874
.
W67
1989
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
119893
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
بهار۹۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)40(
Title Proper
Microlithography: high integration in microelectronics: proceedings of the First Workshop, Rio de Janeiro, Brazil, Aug. 28-Sept. 1, 1989
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Singapore
Name of Publisher, Distributor, etc.
World Scientific
Date of Publication, Distribution, etc.
1990
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
viii, 184 p.: ill.; 22 cm
GENERAL NOTES
Text of Note
Includes bibliographical references
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Microlithography
Entry Element
Congresses ، Integrated circuits-- Very large scale integration-- Design and construction
Entry Element
Congresses ، Photoresists
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
W67
1989
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
editors: Aldo Craievich, G. Gerson Bezerra de Souza, Vitor Baranauskas
AU odlA ,hciveiarC
AU ed arrezeB nosreG .G ,azuoS
AU rotiV ,saksuanaraB
TI
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
Workshop "Microlithography: High Integration in Microelectronics" )1st: 1989: Rio de Janeiro, Brazil(
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
04
