Microelectronic materials and processes : ]proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986[
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht
Name of Publisher, Distributor, etc.
Kluwer Academic
Date of Publication, Distribution, etc.
1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 985 p.: ill.; 25 cm
SERIES
Series Title
NATO ASI series. Series E, Applied sciences; vol.461
GENERAL NOTES
Text of Note
Includes bibliographies
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics-- Materials-- Congresses
Entry Element
، Integrated circuits-- Very large scale integration-- Design and construction-- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
N339
1986
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
edited by R.A. Levy
AU (treblA dnaloR).A dnaloR ,yveL 1944-
CO North Atlantic Treaty Organization
TI
SE NATO ASI series. Series E, Applied sciences; no.164
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
NATO Advanced Study Institute on Microelectronic Materials and Processes )1986: Il Ciocco, Italy(