عنوان
پدید آورنده
موضوع
رده
TK 7836 .H34 1988
TK
7836
.
H34
1988
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
108969
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
بهار۵۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)12(
Title Proper
Handbook of contamination control in microelectronics : principles, applications, and technology
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Park Ridge, N.J., U.S.A.
Name of Publisher, Distributor, etc.
Noyes Publications
Date of Publication, Distribution, etc.
1988
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxi, 488 p. : ill. ; 25 cm
SERIES
Series Title
Materials science and process technology series
GENERAL NOTES
Text of Note
Includes bibliographies and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Integrated circuits-- Design and construction
Entry Element
، Contamination )Technology(
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7836
.
H34
1988
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by Donald L. Tolliver
AU .L dlanoD ,revilloT
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
131
