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عنوان
Glow discharge processes : sputtering and plasma etching

پدید آورنده
Chapman, Brian N.

موضوع
، Sputtering )Physics(,، Glow discharges,، Plasma etching

رده
QC
702
.
7
.
P6
.
C48

کتابخانه
Central Library of Sharif University of Technology

محل استقرار
استان: Tehran ـ شهر: Tehran

Central Library of Sharif University of Technology

تماس با کتابخانه : 66005817-021

OTHER STANDARD IDENTIFIER

Standard Number
108920

LANGUAGE OF THE ITEM

.Language of Text, Soundtrack etc
بها‌ر۵۷
.Language of Text, Soundtrack etc
English

TITLE AND STATEMENT OF RESPONSIBILITY

General Material Designation
)12(
First Statement of Responsibility
Chapman, Brian N.
Title Proper
Glow discharge processes : sputtering and plasma etching

.PUBLICATION, DISTRIBUTION, ETC

Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Wiley
Date of Publication, Distribution, etc.
1980

PHYSICAL DESCRIPTION

Specific Material Designation and Extent of Item
xv, 406 p. : ill. ; 24 cm

GENERAL NOTES

Text of Note
A Wiley-Interscience publication
Text of Note
Bibliography: p. 397-400
Text of Note
Includes index

TOPICAL NAME USED AS SUBJECT

Entry Element
، Sputtering )Physics(
Entry Element
، Glow discharges
Entry Element
، Plasma etching

LIBRARY OF CONGRESS CLASSIFICATION

Class number
QC
702
.
7
.
P6
.
C48

PERSONAL NAME - PRIMARY RESPONSIBILITY

Relator Code
AU
Entry Element
Brian Chapman

TI

LOCATION AND CALL NUMBER

Shelving Form of Title, Author, Author/Title
131

Proposal/Bug Report

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