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عنوان
Glow discharge processes : sputtering and plasma etching
پدید آورنده
Chapman, Brian N.
موضوع
، Sputtering )Physics(,، Glow discharges,، Plasma etching
رده
QC
702
.
7
.
P6
.
C48
کتابخانه
Central Library of Sharif University of Technology
محل استقرار
استان:
Tehran
ـ شهر:
Tehran
تماس با کتابخانه :
66005817
-
021
OTHER STANDARD IDENTIFIER
Standard Number
108920
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
بهار۵۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)12(
First Statement of Responsibility
Chapman, Brian N.
Title Proper
Glow discharge processes : sputtering and plasma etching
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Wiley
Date of Publication, Distribution, etc.
1980
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xv, 406 p. : ill. ; 24 cm
GENERAL NOTES
Text of Note
A Wiley-Interscience publication
Text of Note
Bibliography: p. 397-400
Text of Note
Includes index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Sputtering )Physics(
Entry Element
، Glow discharges
Entry Element
، Plasma etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC
702
.
7
.
P6
.
C48
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
Brian Chapman
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
131
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