عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .I578 1984
TK
7871
.
85
.
I578
1984
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
80573
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)80(
Title Proper
Ion implantation: equipment & techniques: proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers 'Notch, Jeffersonville VT. USA. July 23-27, 1984
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amsterdam
Name of Publisher, Distributor, etc.
North-Holland
Date of Publication, Distribution, etc.
1985
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 457 p. ill.; 27 cm
SERIES
Series Title
Nuclear instruments & methods in physics research. Section b, Beam interactions with
TOPICAL NAME USED AS SUBJECT
Entry Element
، Ion implantation-- Congresses
Entry Element
، semiconductor doping-- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
I578
1984
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
editors, J. F. Ziegler, R. L. Brown
AU (.F semaJ) .F .J ,relgeiZ
AU L .R ,nworB
TI
SE
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
International Conference on Ion Implantation: Equipment and Techniques )5th: 1984: Jefferson-ville, Vt.(
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
08
